서브비주얼

주성 Milestone

world’s first
Technology

Semiconductor
History

  • 1947

    Transistor

  • 1968

    DRAM

  • 1971

    CPU

  • 1987

    DRAM

  • Single Tube Vertical LPCVD

1993

  • Selective HSG
  • Warm Wall Type MOCVD

1995

  • High-k ALD MOCVD
  • ICP HDP

1997

  • Selective Epi.
  • ICP Etcher

1998

  • PECVD for LCD

1999

  • SD (ALD & CVD)

2000

  • LSP Tech.

2002

  • SDP (ALD & CVD)

2003

  • Thin Film & Crystalline Solar Tech.
  • TSD Tech.

2005

  • ALD High-k Metal Oxide

2006

  • TSD ALD & CVD
  • ALD Metal Oxide Tr.
  • HJT Solar Tech.

2007

  • LSP-HDP

2008

  • LSP-Etcher

2011

  • ALD Guidance Series

2014

  • Selective ALG Tech.

2018

  • ALD Perovskite Solar Tech.

2020

  • 2HGA

2021

  • ALG III V Materials.

2022

  • ALG Graphene.

2023

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